bibtype J - Journal Article
ARLID 0304154
utime 20240103180957.3
mtime 20051130235959.9
title (primary) (eng) Formation of excited Ag atoms in sputtering of silver
specification
page_count 5 s.
serial
ARLID cav_un_epca*0257431
ISSN 0163-1829
title Physical Review. B
volume_id 68
volume 11 (2003)
page_num 1154261-1154265
keyword ionisation
keyword collision processes
keyword sputtering
author (primary)
ARLID cav_un_auth*0101747
name1 Šroubek
institution URE-Y
name2 Zdeněk
fullinstit Ústav fotoniky a elektroniky AV ČR, v. v. i.
author
ARLID cav_un_auth*0101209
name1 Šroubek
name2 Filip
institution UTIA-B
full_dept Department of Image Processing
fullinstit Ústav teorie informace a automatizace AV ČR, v. v. i.
author
ARLID cav_un_auth*0020909
name1 Wucher
name2 A.
country DE
author
ARLID cav_un_auth*0015488
name1 Yarmoff
name2 J. A.
country US
COSATI 20K
cas_special
project
project_id ME 469
agency GA MŠk
ARLID cav_un_auth*0028572
project
project_id ME 328
agency GA MŠk
ARLID cav_un_auth*0028434
research CEZ:AV0Z2067918
abstract (eng) A model is presented of the formation of escited Ag.sup.*.sup. (4d.sup.9 .sup.5s.sup.2.sup.) atoms during sputtering of Ag metal by energetic Ar.sup.+.sup. ions. The essential part of the formation process is the slow diffusion of 4d-holes in the collision cascade from the sites of violet Ag-Ag collisions to the emitted Ag atoms. Computer simulation of Ag cascades and of the 4d-hole trasnport allows us to quantify the model and to describe all characteristic features of the available experimental data, in particular the fact that the sputtered Ag.sup.*.sup. atoms exhibit a narrower kinetic energy distribution than those ejected in the electronic ground state.
reportyear 2004
RIV BM
department S
permalink http://hdl.handle.net/11104/0114295
ID_orig URE-Y 20030094
arlyear 2003
mrcbU63 cav_un_epca*0257431 Physical Review. B 0163-1829 Roč. 68 č. 11 2003 1154261 1154265